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Method for the preparation of nanocrystalline diamond thin films

United States Patent

*** EXPIRED ***
5,772,760
June 30, 1998
View the Complete Patent at the US Patent & Trademark Office
Argonne National Laboratory - Visit the Technology Development and Commercialization Website
A method and system for manufacturing nanocrystalline diamond film on a substrate such as field emission tips. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrocarbon and possibly hydrogen, and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous vapor and deposition of a diamond film on the field emission tip.
Gruen; Dieter M. (Downers Grove, IL), Krauss; Alan R. (Naperville, IL)
The University Of Chicago (Chicago, IL)
08/ 540,916
October 11, 1995
The United States Government has rights in this invention pursuant to Contract W-31-109-ENG-38 between the U.S. Department of Energy and the University of Chicago.