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Scanning fluorescent microthermal imaging apparatus and method

United States Patent

*** EXPIRED ***
January 6, 1998
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A scanning fluorescent microthermal imaging (FMI) apparatus and method is disclosed, useful for integrated circuit (IC) failure analysis, that uses a scanned and focused beam from a laser to excite a thin fluorescent film disposed over the surface of the IC. By collecting fluorescent radiation from the film, and performing point-by-point data collection with a single-point photodetector, a thermal map of the IC is formed to measure any localized heating associated with defects in the IC.
Barton; Daniel L. (Albuquerque, NM), Tangyunyong; Paiboon (Albuquerque, NM)
Sandia Corporation (
08/ 743,787
November 7, 1996
GOVERNMENT RIGHTS The Government has rights to this invention pursuant to Contract No. DE-AC04-94AL85000 awarded by the U.S. Department of Energy.