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Structurally controlled deposition of silicon onto nanowires

United States Patent

March 20, 2018
View the Complete Patent at the US Patent & Trademark Office
Provided herein are nanostructures for lithium ion battery electrodes and methods of fabrication. In some embodiments, a nanostructure template coated with a silicon coating is provided. The silicon coating may include a non-conformal, more porous layer and a conformal, denser layer on the non-conformal, more porous layer. In some embodiments, two different deposition processes, e.g., a PECVD layer to deposit the non-conformal layer and a thermal CVD process to deposit the conformal layer, are used. Anodes including the nanostructures have longer cycle lifetimes than anodes made using either a PECVD or thermal CVD method alone.
Wang; Weijie (Sunnyvale, CA), Liu; Zuqin (Sunnyvale, CA), Han; Song (Foster City, CA), Bornstein; Jonathan (Cupertino, CA), Stefan; Constantin Ionel (San Jose, CA)
Amprius, Inc. (Sunnyvale, CA)
14/ 710,103
May 12, 2015
STATEMENT OF GOVERNMENT SUPPORT The invention described and claimed herein was made in part utilizing funds supplied by the U.S. Department of Energy under Contract No. DE-EE0005474. The Government has certain rights in this invention.