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MEMS vibrating-beam accelerometer with piezoelectric drive

United States Patent

September 12, 2017
View the Complete Patent at the US Patent & Trademark Office
A high-temperature drive component for a double-ended tuning fork (DETF). The drive component attaches to a surface of at least one of the tines. The drive component includes at least one piezoelectric trace sandwiched at least partially between two electrical traces. At least one of the tines includes a doped silicon base with drive component located thereon. One of the electrical traces is electrically connected to the doped silicon base and the other is electrically isolated from the doped silicon base.
Strehlow; John (Mukilteo, WA), MacGugan; Doug (Bellevue, WA)
Honeywell International Inc. (Morris Plains, NJ)
13/ 019,913
February 2, 2011
GOVERNMENT INTEREST The invention described herein was made in the performance of work under U.S. Government Contract No. DE-EE0002754, awarded by Department of Energy. The Government may have rights to portions of this invention.