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Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof

United States Patent

March 28, 2017
View the Complete Patent at the US Patent & Trademark Office
A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated and embedded in the openings. The insulating material is coated on or around an exposed surface of the coil. Alternating magnetic layers and electrically insulating layers may be micro-fabricated and electroplated as a single and substantially continuous segment on or around the insulating material.
Mihailovich; Robert E. (Newbury Park, CA), Papavasiliou; Alex P. (Thousand Oaks, CA), Mehrotra; Vivek (Simi Valley, CA), Stupar; Philip A. (Oxnard, CA), Borwick, III; Robert L. (Thousand Oaks, CA), Ganguli; Rahul (Oak Park, CA), DeNatale; Jeffrey F. (Thousand Oaks, CA)
Teledyne Scientific & Imaging, LLC (Thousand Oaks, CA)
14/ 476,644
September 3, 2014
STATEMENT REGARDING GOVERNMENT RIGHTS This invention was made with Government support under Government Contract Reference No. DE-AR0000113 awarded by Advanced Research Projects Agency--Energy of U.S. Department of Energy. The Government has certain rights in this invention.