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Stabilizing laser energy density on a target during pulsed laser deposition of thin films

United States Patent

May 31, 2016
View the Complete Patent at the US Patent & Trademark Office
Los Alamos National Laboratory - Visit the Technology Transfer Division Website
A process for stabilizing laser energy density on a target surface during pulsed laser deposition of thin films controls the focused laser spot on the target. The process involves imaging an image-aperture positioned in the beamline. This eliminates changes in the beam dimensions of the laser. A continuously variable attenuator located in between the output of the laser and the imaged image-aperture adjusts the energy to a desired level by running the laser in a "constant voltage" mode. The process provides reproducibility and controllability for deposition of electronic thin films by pulsed laser deposition.
Dowden; Paul C. (Los Alamos, NM), Jia; Quanxi (Los Alamos, NM)
Los Alamos National Security, LLC (Los Alamos, NM)
14/ 042,167
September 30, 2013
STATEMENT REGARDING FEDERAL RIGHTS This invention was made with government support under Contract No. DE-AC52-06NA25396 awarded by the U.S. Department of Energy. The government has certain rights in the invention.