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Tuning method for microresonators and microresonators made thereby

United States Patent

December 1, 2015
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A micromechanical resonator is disclosed. The resonator includes a resonant micromechanical element. A film of annealable material can be deposited on a facial surface of the element. The resonance of the element can be tuned by annealing the deposited film. Also disclosed are methods of applying a film on a resonator and annealing the film, thereby tuning one or more resonant properties of the resonator.
Henry; Michael David (Albuquerque, NM), Olsson; Roy H. (Albuquerque, NM), Greth; Karl Douglas (Albuquerque, NM), Young; Travis Ryan (Albuquerque, NM), Nguyen; Janet (Albuquerque, NM), Stevens; James E. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
13/ 780,285
February 28, 2013
STATEMENT OF GOVERNMENT INTEREST This invention was developed under Contract DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The U.S. Government has certain rights in this invention.