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Telescopic nanotube device for hot nanolithography

United States Patent

December 30, 2014
View the Complete Patent at the US Patent & Trademark Office
A device for maintaining a constant tip-surface distance for producing nanolithography patterns on a surface using a telescopic nanotube for hot nanolithography. An outer nanotube is attached to an AFM cantilever opposite a support end. An inner nanotube is telescopically disposed within the outer nanotube. The tip of the inner nanotube is heated to a sufficiently high temperature and brought in the vicinity of the surface. Heat is transmitted to the surface for thermal imprinting. Because the inner tube moves telescopically along the outer nanotube axis, a tip-surface distance is maintained constant due to the vdW force interaction, which in turn eliminates the need of an active feedback loop.
Popescu; Adrian (Tampa, FL), Woods; Lilia M. (Tampa, FL)
University of South Florida (Tampa, FL)
13/ 023,782
February 9, 2011
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT This invention was made with Government support under Department of Energy contract number DE-FG02-06ER46297. The government has certain rights in this invention.