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Method of fabricating low-dislocation-density epitaxially-grown films with textured surfaces

United States Patent

January 13, 2015
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A method for forming a surface-textured single-crystal film layer by growing the film atop a layer of microparticles on a substrate and subsequently selectively etching away the microparticles to release the surface-textured single-crystal film layer from the substrate. This method is applicable to a very wide variety of substrates and films. In some embodiments, the film is an epitaxial film that has been grown in crystallographic alignment with respect to a crystalline substrate.
Li; Qiming (Albuquerque, NM), Wang; George T. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
13/ 113,123
May 23, 2011
The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.