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Multilayer moisture barrier

United States Patent

April 21, 2015
View the Complete Patent at the US Patent & Trademark Office
National Renewable Energy Laboratory - Visit the NREL Technology Transfer Website
Moisture Barrier
A moisture barrier, device or product having a moisture barrier or a method of fabricating a moisture barrier having at least a polymer layer, and interfacial layer, and a barrier layer. The polymer layer may be fabricated from any suitable polymer including, but not limited to, fluoropolymers such as polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), or ethylene-tetrafluoroethylene (ETFE). The interfacial layer may be formed by atomic layer deposition (ALD). In embodiments featuring an ALD interfacial layer, the deposited interfacial substance may be, but is not limited to, Al.sub.2O.sub.3, AlSiO.sub.x, TiO.sub.2, and an Al.sub.2O.sub.3/TiO.sub.2 laminate. The barrier layer associated with the interfacial layer may be deposited by plasma enhanced chemical vapor deposition (PECVD). The barrier layer may be a SiO.sub.xN.sub.y film.
Pankow; Joel W. (Littleton, CO), Jorgensen; Gary J. (Pine, CO), Terwilliger; Kent M. (Lakewood, CO), Glick; Stephen H. (Evergreen, CO), Isomaki; Nora (Espoo, FI), Harkonen; Kari (Kauniainen, FI), Turkulainen; Tommy (Kirkkonummi, FI)
Beneq Oy (Vantaa, FI), U.S. Department of Energy (Washington, DC)
13/ 579,459
February 17, 2011
CONTRACTUAL ORIGIN The United States Government has rights in this invention under Contract No. DE-AC36-08GO28308 between the United States Department of Energy and the National Renewable Energy Laboratory, managed and operated by the Alliance for Sustainable Energy, LLC.