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Process and structures for fabrication of solar cells with laser ablation steps to form contact holes

United States Patent

November 19, 2013
View the Complete Patent at the US Patent & Trademark Office
Contact holes of solar cells are formed by laser ablation to accommodate various solar cell designs. Use of a laser to form the contact holes is facilitated by replacing films formed on the diffusion regions with a film that has substantially uniform thickness. Contact holes may be formed to deep diffusion regions to increase the laser ablation process margins. The laser configuration may be tailored to form contact holes through dielectric films of varying thicknesses.
Harley; Gabriel (Mountain View, CA), Smith; David D. (Campbell, CA), Dennis; Tim (Canton, TX), Waldhauer; Ann (La Honda, CA), Kim; Taeseok (San Jose, CA), Cousins; Peter John (Menlo Park, CA)
SunPower Corporation (San Jose, CA)
13/ 028,059
February 15, 2011
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT The invention described herein was made with Governmental support under contract number DE-FC36-07GO17043 awarded by the United States Department of Energy. The Government may have certain rights in the invention.