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Automated cassette-to-cassette substrate handling system

United States Patent

March 18, 2014
View the Complete Patent at the US Patent & Trademark Office
An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.
Kraus; Joseph Arthur (Hamilton, NJ), Boyer; Jeremy James (Chelmsford, MA), Mack; Joseph (Manchester, NH), DeChellis; Michael (Brooklyn, NY), Koo; Michael (Somerset, NJ)
Veeco Instruments Inc. (Plainview, NY)
13/ 406,076
February 27, 2012
FEDERAL RESEARCH STATEMENT This invention was made with Government support under U.S. Department of Energy SSL Manufacturing Grant DE-EE0003252. The Government has certain rights in this invention.