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Stable wafer-carrier system

United States Patent

October 22, 2013
View the Complete Patent at the US Patent & Trademark Office
One embodiment of the present invention provides a wafer-carrier system used in a deposition chamber for carrying wafers. The wafer-carrier system includes a base susceptor and a top susceptor nested inside the base susceptor with its wafer-mounting side facing the base susceptor's wafer-mounting side, thereby forming a substantially enclosed narrow channel. The base susceptor provides an upward support to the top susceptor.
Rozenzon; Yan (San Carlos, CA), Trujillo; Robert T. (Saratoga, CA), Beese; Steven C. (Fremont, CA)
Silevo, Inc. (Fremont, CA)
12/ 963,445
December 8, 2010
This invention was made with government support under DE-EE0000589 awarded by Department of Energy. The government has certain rights in the invention.