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Ovenized microelectromechanical system (MEMS) resonator

United States Patent

March 11, 2014
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
An ovenized micro-electro-mechanical system (MEMS) resonator including: a substantially thermally isolated mechanical resonator cavity; a mechanical oscillator coupled to the mechanical resonator cavity; and a heating element formed on the mechanical resonator cavity.
Olsson; Roy H. (Albuquerque, NM), Wojciechowski; Kenneth (Albuquerque, NM), Kim; Bongsang (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
13/ 442,689
April 9, 2012
This invention was developed under Contract DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The U.S. Government has certain rights in this invention.