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High quality transparent conducting oxide thin films

United States Patent

August 28, 2012
View the Complete Patent at the US Patent & Trademark Office
National Renewable Energy Laboratory - Visit the NREL Technology Transfer Website
High Quality Transparent Conducting Oxide Thin Films
A transparent conducting oxide (TCO) film comprising: a TCO layer, and dopants selected from the elements consisting of Vanadium, Molybdenum, Tantalum, Niobium, Antimony, Titanium, Zirconium, and Hafnium, wherein the elements are n-type dopants; and wherein the transparent conducting oxide is characterized by an improved electron mobility of about 42 cm.sup.2/V-sec while simultaneously maintaining a high carrier density of .about.4.4e.times.10.sup.20 cm.sup.-3.
Gessert; Timothy A. (Conifer, CO), Duenow; Joel N. (Golden, CO), Barnes; Teresa (Evergreen, CO), Coutts; Timothy J. (Golden, CO)
Alliance for Sustainable Energy, LLC (Golden, CO)
12/ 441,707
March 17, 2008
CONTRACTUAL ORIGIN The United States Government has rights in this invention under Contract No. DE-AC3699G010337 between the United States Department of Energy and the National Renewable Energy Laboratory, a division of the Midwest Research Institute.