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Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope

United States Patent

August 17, 2010
View the Complete Patent at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
A confocal scanning transmission electron microscope which includes an electron illumination device providing an incident electron beam propagating in a direction defining a propagation axis, and a precision specimen scanning stage positioned along the propagation axis and movable in at least one direction transverse to the propagation axis. The precision specimen scanning stage is configured for positioning a specimen relative to the incident electron beam. A projector lens receives a transmitted electron beam transmitted through at least part of the specimen and focuses this transmitted beam onto an image plane, where the transmitted beam results from the specimen being illuminated by the incident electron beam. A detection system is placed approximately in the image plane.
de Jonge; Niels (Oak Ridge, TN)
UT-Battelle, LLC (Oak Ridge, TN)
11/ 860,760
September 25, 2007
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH This invention was made with assistance under Contract No. DE-AC05-00OR22725 with the U.S. Department of Energy. The Government has certain rights in this invention.