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Nanocomposite films

United States Patent

July 20, 2010
View the Complete Patent at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
A thin-film composition of nanocrystal molybdenum in an amorphous metallic matrix may be formed by co-sputtering Mo with aluminum or nickel. NEMS cantilevers may be formed from the film. The films exhibit high nanoindentation hardness and a reduction in roughness and intrinsic stress, while maintaining resistivity in the metallic range.
Mitlin; David (Edmonton, CA), Ophus; Colin (Edmonton, CA), Evoy; Stephane (Edmonton, CA), Radmilovic; Velimir (Piedmont, CA), Mohammadi; Reza (Edmonton, CA), Westra; Ken (Edmonton, CA), Nelson-Fitzpatrick; Nathaniel (Edmonton, CA), Lee; Zonghoon (Albany, CA)
The Governors of the University of Alberta (Edmonton, Alberta, CA), The University of California (Oakland, CA)
11/ 831,434
July 31, 2007
STATEMENT OF GOVERNMENTAL SUPPORT The invention described and claimed herein was made in part utilizing funds supplied by the U.S. Department of Energy under Contract No. DE-AC03-76SF00098, and more recently under DE-AC02-05CH11231. The United States government has certain rights in this invention.