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Methods for the fabrication of thermally stable magnetic tunnel junctions

United States Patent

August 25, 2009
View the Complete Patent at the US Patent & Trademark Office
Magnetic tunnel junctions and method for making the magnetic tunnel junctions are provided. The magnetic tunnel junctions are characterized by a tunnel barrier oxide layer sandwiched between two ferromagnetic layers. The methods used to fabricate the magnetic tunnel junctions are capable of completely and selectively oxidizing a tunnel junction precursor material using an oxidizing gas containing a mixture of gases to provide a tunnel junction oxide without oxidizing the adjacent ferromagnetic materials. In some embodiments the gas mixture is a mixture of CO and CO.sub.2 or a mixture of H.sub.2 and H.sub.2O.
Chang; Y. Austin (Middleton, WI), Yang; Jianhua J. (Madison, WI), Ladwig; Peter F. (Hutchinson, MN)
Wisconsin Alumni Research Foundation (Madison, WI)
10/ 902,281
July 29, 2004
STATEMENT OF GOVERNMENT RIGHTS Research funding was provided for this invention by the United States Department of Energy under grant No. DE-FG02-99ER45777. The United States government has certain rights in this invention.