Skip to Content
Find More Like This
Return to Search

Vacuum compatible, high-speed, 2-D mirror tilt stage

United States Patent

September 25, 2007
View the Complete Patent at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.
Denham; Paul E. (Crockett, CA)
Euv LLC (Santa Clara, CA)
11/ 132,783
May 19, 2005
The U.S. Government has certain rights in this invention pursuant to Contract No. DE-AC03-76SF00098 between the United States Department of Energy and the University of California for the operation of the Lawrence Berkeley National Laboratory.