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Electrical latching of microelectromechanical devices

United States Patent

November 2, 2004
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
Methods are disclosed for row and column addressing of an array of microelectromechanical (MEM) devices. The methods of the present invention are applicable to MEM micromirrors or memory elements and allow the MEM array to be programmed and maintained latched in a programmed state with a voltage that is generally lower than the voltage required for electrostatically switching the MEM devices.
Garcia; Ernest J. (Albuquerque, NM), Sleefe; Gerard E. (Cedar Crest, NM)
Sandia Corporation (Albuquerque, NM)
10/ 316,172
December 9, 2002
GOVERNMENT RIGHTS This invention was made with Government support under Contract No. DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.