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Decal transfer microfabrication

United States Patent

October 19, 2004
View the Complete Patent at the US Patent & Trademark Office
A method of making a microstructure includes forming a pattern in a surface of a silicon-containing elastomer, oxidizing the pattern, contacting the pattern with a substrate; and bonding the oxidized pattern and the substrate such that the pattern and the substrate are irreversibly attached. The silicon-containing elastomer may be removably attached to a transfer pad.
Nuzzo; Ralph G. (Champaign, IL), Childs; William Robert (Champaign, IL)
Board of Trustees of University of Illinois (Urbana, IL)
10/ 230,882
August 28, 2002
FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT The subject matter of this application was in part funded by the National Science Foundation (Grant no. CHE 0097096); by the Defense Advanced Research Projects Agency (DARPA; Grant no. SPAWAR: N6600198-1-8915); and by the Department of Energy (DOE Grant no. DEFG02-91ER45439). The government may have certain rights in this invention.