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Micromechanical apparatus for measurement of forces

United States Patent

May 25, 2004
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A new class of micromechanical dynamometers has been disclosed which are particularly suited to fabrication in parallel with other microelectromechanical apparatus. Forces in the microNewton regime and below can be measured with such dynamometers which are based on a high-compliance deflection element (e.g. a ring or annulus) suspended above a substrate for deflection by an applied force, and one or more distance scales for optically measuring the deflection.
Tanner; Danelle Mary (Albuquerque, NM), Allen; James Joe (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
09/ 665,978
September 20, 2000
GOVERNMENT RIGHTS This invention was made with Government support under Contract DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.