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Planar-constructed spatial micro-stage

United States Patent

January 13, 2004
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A multiple degree of freedom platform assembly formed from a plurality of thin films on a substrate can, when activated, move out of the plane of the substrate without additional manufacturing steps. The platform is connected to the substrate by at least three linkages, each linkage being pivotally connected to the platform and the base. At least two of the base connections are to powered traveling devices that are manufactured at one end of a path and which may be moved to locations along the path to cause the platform to move to predetermined positions. The entire assembly, including hinges, is manufactured as planar structures; preferably by a thin film technology such as MEMS.
Jokiel, Jr.; Bernhard (Albuquerque, NM), Benavides; Gilbert L. (Albuquerque, NM), Bieg; Lothar F. (Albuquerque, NM), Allen; James J. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
10/ 153,109
May 22, 2002
CROSS REFERENCE TO RELATED APPLICATIONS (Not Applicable) The United States Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.