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Process for manufacture of semipermeable silicon nitride membranes

United States Patent

December 9, 2003
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
Semipermeable Membranes for Micromachined Silicon Surfaces
A new class of semipermeable membranes, and techniques for their fabrication, have been developed. These membranes, formed by appropriate etching of a deposited silicon nitride layer, are robust, easily manufacturable, and compatible with a wide range of silicon micromachining techniques.
Galambos; Paul Charles (Albuquerque, NM), Shul; Randy J. (Albuquerque, NM), Willison; Christi Gober (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
09/ 678,418
October 2, 2000
GOVERNMENT RIGHTS This invention was made with Government support under Contract DE-AC04-94AL85000 awarded by the U.S. Department of Energy. The Government has certain rights in the invention.