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Apparatus and system for multivariate spectral analysis

United States Patent

June 24, 2003
View the Complete Patent at the US Patent & Trademark Office
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An apparatus and system for determining the properties of a sample from measured spectral data collected from the sample by performing a method of multivariate spectral analysis. The method can include: generating a two-dimensional matrix A containing measured spectral data; providing a weighted spectral data matrix D by performing a weighting operation on matrix A; factoring D into the product of two matrices, C and S.sup.T, by performing a constrained alternating least-squares analysis of D=CS.sup.T, where C is a concentration intensity matrix and S is a spectral shapes matrix; unweighting C and S by applying the inverse of the weighting used previously; and determining the properties of the sample by inspecting C and S. This method can be used by a spectrum analyzer to process X-ray spectral data generated by a spectral analysis system that can include a Scanning Electron Microscope (SEM) with an Energy Dispersive Detector and Pulse Height Analyzer.
Keenan; Michael R. (Albuquerque, NM), Kotula; Paul G. (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
09/ 872,740
June 1, 2001
FEDERALLY SPONSORED RESEARCH The U.S. Government has rights in this invention pursuant to Department of Energy Contract No. DE-AC04-94AL85000 with Sandia Corporation.