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Near field optical scanning system employing microfabricated solid immersion lens

United States Patent

August 27, 2002
View the Complete Patent at the US Patent & Trademark Office
A solid immersion lens integrated on a flexible support such as a cantilever or membrane is described, together with a method of forming the integrated structure.
Cozier; Kenneth B. (Stanford, CA), Fletcher; Daniel A. (Menlo Park, CA), Kino; Gordon S. (Stanford, CA), Quate; Calvin F. (Stanford, CA), Soh; Hyongsok T. (Stanford, CA)
The Board of Trustees of the Leland Stanford Junior University (Palo Alto, CA)
09/ 414,674
October 7, 1999
GOVERNMENT SUPPORT This invention was made with Government support under Contract Nos. JSEP/ONR N00014-91-J-1050 awarded by the United States Department of the Navy, and Department of Energy Contract No. DEFG03-90ER14157. The Government has certain rights to this invention.