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Parallel detecting, spectroscopic ellipsometers/polarimeters

United States Patent

May 7, 2002
View the Complete Patent at the US Patent & Trademark Office
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The parallel detecting spectroscopic ellipsometer/polarimeter sensor has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample within a processing chamber. It includes a multi-spectral source of radiation for producing a collimated beam of radiation directed towards the surface of the sample through a polarizer. The thus polarized collimated beam of radiation impacts and is reflected from the surface of the sample, thereby changing its polarization state due to the intrinsic material properties of the sample. The light reflected from the sample is separated into four separate polarized filtered beams, each having individual spectral intensities. Data about said four individual spectral intensities is collected within the processing chamber, and is transmitted into one or more spectrometers. The data of all four individual spectral intensities is then analyzed using transformation algorithms, in real-time.
Furtak; Thomas E. (Golden, CO)
09/ 715,921
November 17, 2000
GOVERNMENT LICENSE RIGHTS This invention was made with Government support under contract number DAA HO1-96-C-R302 awarded by the U.S. Army, under Agreement No. MDA 972-95-3-0036 awarded by DARPA, and under subcontract number ZAX-8-17647-11 under prime contracts DE-AC36-83 CH10093 and DE-AC36-98GO10337 awarded by the Department of Energy. The Government has certain rights in this invention.