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Quartz antenna with hollow conductor

United States Patent

April 23, 2002
View the Complete Patent at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
A radio frequency (RF) antenna for plasma ion sources is formed of a hollow metal conductor tube disposed within a glass tube. The hollow metal tubular conductor has an internal flow channel so that there will be no coolant leakage if the outer glass tube of the antenna breaks. A portion of the RF antenna is formed into a coil; the antenna is used for inductively coupling RF power to a plasma in an ion source chamber. The antenna is made by first inserting the metal tube inside the glass tube, and then forming the glass/metal composite tube into the desired coil shape.
Leung; Ka-Ngo (Hercules, CA), Benabou; Elie (Alameda, CA)
The Regents of the University of California (Oakland, CA)
09/ 519,139
March 6, 2000
GOVERNMENT RIGHTS The United States Government has the rights in this invention pursuant to Contract No.DE-AC03-76SF00098 between the United States Department of Energy and the University of California