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Method using photo-induced and thermal bending of MEMS sensors

United States Patent

November 6, 2001
View the Complete Patent at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
A method for measuring chemical analytes and physical forces by measuring changes in the deflection of a microelectromechanical cantilever structure while it is being irradiated by a light having an energy above the band gap of the structure.
Datskos; Panagiotis G. (Knoxville, TN)
U.T. Battelle, LLC (Oak Ridge, TN)
09/ 281,256
March 30, 1999
This invention was made with government support under contract DE AC05-96OR22460 awarded by the U.S. Department of Energy to Lockheed Martin Energy Research Corporation and the Government has certain rights in this invention.