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Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film

United States Patent

July 24, 2001
View the Complete Patent at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
Methods and apparatus for detecting particular frequencies of acoustic vibration utilize an electrostatically-tunable beam element having a stress-sensitive coating and means for providing electrostatic force to controllably deflect the beam element thereby changing its stiffness and its resonance frequency. It is then determined from the response of the electrostatically-tunable beam element to the acoustical vibration to which the beam is exposed whether or not a particular frequency or frequencies of acoustic vibration are detected.
Thundat; Thomas G. (Knoxville, TN), Wachter; Eric A. (Oak Ridge, TN), Davis; J. Kenneth (Kingston, TN)
UT-Battelle, LLC (Oak Ridge, TN)
09/ 404,954
September 24, 1999
The United States Government has rights in this invention pursuant to contract no. DE-AC05-96OR22464 between the United States Department of Energy and Lockheed Martin Energy Research Corporation.