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Process for producing radiation-induced self-terminating protective coatings on a substrate

United States Patent

May 15, 2001
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A gas and radiation are used to produce a protective coating that is substantially void-free on the molecular scale, self-terminating, and degradation resistant. The process can be used to deposit very thin (.apprxeq.5-20 .ANG.) coatings on critical surfaces needing protection from degradative processes including, corrosion and contamination.
Klebanoff; Leonard E. (Dublin, CA)
EUV LLC (Santa Clara, CA)
09/ 470,670
December 23, 1999
STATEMENT OF GOVERNMENT INTEREST This invention was made with Government support under contract no. DE-AC04-94AL85000 awarded by the U.S. Department of Energy to Sandia Corporation. The Government has certain rights in the invention.