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Method and apparatus for thickness measurement using microwaves

United States Patent

March 6, 2001
View the Complete Patent at the US Patent & Trademark Office
Pacific Northwest National Laboratory - Visit the Technology Commercialization Program Website
The method for measuring the thickness of a material which transmits a detectable amount of microwave radiation includes irradiating the material with coherent microwave radiation tuned over a frequency range. Reflected microwave radiation is detected, the reflected radiation having maxima and minima over the frequency range as a result of coherent interference of microwaves reflected from reflecting surfaces of the material. The thickness of the material is determined from the period of the maxima and minima along with knowledge of the index of refraction of the material.
Woskov; Paul (Bedford, MA), Lamar; David A. (West Richland, WA)
Massachusetts Institute of Technology (Cambridge, MA)
09/ 048,595
March 26, 1998
This invention was made with government support under Contract number DE-AC06-76RL01830 awarded by the U.S. Department of Energy. The government has certain rights in the invention.