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Plasma enhanced chemical vapor deposition (PECVD) method of forming vanadium oxide films and vanadium oxide thin-films prepared thereby

United States Patent

December 5, 2000
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A method is disclosed of forming a vanadium oxide film on a substrate utilizing plasma enhanced chemical vapor deposition. The method includes positioning a substrate within a plasma reaction chamber and then forming a precursor gas comprised of a vanadium-containing chloride gas in an inert carrier gas. This precursor gas is then mixed with selected amounts of hydrogen and oxygen and directed into the reaction chamber. The amounts of precursor gas, oxygen and hydrogen are selected to optimize the final properties of the vanadium oxide film An rf plasma is generated within the reaction chamber to chemically react the precursor gas with the hydrogen and the oxygen to cause deposition of a vanadium oxide film on the substrate while the chamber deposition pressure is maintained at about one torr or less. Finally, the byproduct gases are removed from the plasma reaction chamber.
Zhang; Ji-Guang (Golden, CO), Tracy; C. Edwin (Golden, CO), Benson; David K. (Golden, CO), Turner; John A. (Littleton, CO), Liu; Ping (Lakewood, CO)
Midwest Research Institute (Kansas City, MO)
09/ 325,146
June 3, 1999
CONTRACT ORIGIN OF THE INVENTION The United States Government has rights in this invention pursuant to Contract No. DE-AC-36-83CH 10093 between the United States Department of Energy and the National Renewable Energy Laboratory, a division of the Midwest Research Institute.