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Method of producing solution-derived metal oxide thin films

United States Patent

July 11, 2000
View the Complete Patent at the US Patent & Trademark Office
Sandia National Laboratories - Visit the Intellectual Property Management and Licensing Website
A method of preparing metal oxide thin films by a solution method. A .beta.-metal .beta.-diketonate or carboxylate compound, where the metal is selected from groups 8, 9, 10, 11, and 12 of the Periodic Table, is solubilized in a strong Lewis base to form a homogeneous solution. This precursor solution forms within minutes and can be deposited on a substrate in a single layer or a multiple layers to form a metal oxide thin film. The substrate with the deposited thin film is heated to change the film from an amorphous phase to a ceramic metal oxide and cooled.
Boyle; Timothy J. (Albuquerque, NM), Ingersoll; David (Albuquerque, NM)
Sandia Corporation (Albuquerque, NM)
09/ 321,911
May 28, 1999
This invention was made with Government support under Contract No. DEAC04-94AL85000 awarded by the Department of Energy. The Government has certain rights in the invention.