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Smooth diamond films as low friction, long wear surfaces

United States Patent

November 23, 1999
View the Complete Patent at the US Patent & Trademark Office
Argonne National Laboratory - Visit the Technology Development and Commercialization Website
An article and method of manufacture of a nanocrystalline diamond film. The nanocrystalline film is prepared by forming a carbonaceous vapor, providing an inert gas containing gas stream and combining the gas stream with the carbonaceous containing vapor. A plasma of the combined vapor and gas stream is formed in a chamber and fragmented carbon species are deposited onto a substrate to form the nanocrystalline diamond film having a root mean square flatness of about 50 nm deviation from flatness in the as deposited state.
Gruen; Dieter M. (Downers Grove, IL), Krauss; Alan R. (Naperville, IL), Erdemir; Ali (Naperville, IL), Bindal; Cuma (Woodridge, IL), Zuiker; Christopher D. (LaGrange, IL)
The University of Chicago (Chicago, IL)
08/ 620,932
March 22, 1996
The United States Government has rights in this invention pursuant to Contract W-31-109-ENG-38 between the U.S. Department of Energy and the University of Chicago.