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Response microcantilever thermal detector

United States Patent Application

View the Complete Application at the US Patent & Trademark Office
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A "folded leg" thermal detector microcantilever constructed of a substrate with at least one leg interposed between a fixed end and a deflective end, each leg having at least three essentially parallel leg segments interconnected on alternate opposing ends and aligned in a serpentine pattern with only the first leg segment attached to the fixed end and only the last leg segment attached to the deflective end. Alternate leg segment are coated on the pentalever with coating applied to the top of the first, third, and fifth leg segments of each leg and to the bottom of the second and fourth leg segments of each leg.
Cunningham, Joseph P. (Oak Ridge, TN), Rajic, Slobodan (Knoxville, TN), Datskos, Panagiotis G. (Knoxville, TN), Evans, Boyd M. III (Oak Ridge, TN)
09/ 811,234
March 16, 2001
[0002] This invention was made with Government support under contract no. DE-AC05-00OR22725 to UT-Battelle, LLC, awarded by the United States Department of Energy. The Government has certain rights in the invention.