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Method for controlled growth of carbon nanotubes in a vertically aligned array

United States Patent Application

View the Complete Application at the US Patent & Trademark Office
Template-guided growth of carbon nanotubes using anodized aluminum oxide nanopore templates provides vertically aligned, untangled planarized arrays of multiwall carbon nanotubes with Ohmic back contacts. Growth by catalytic chemical vapor deposition results in multiwall carbon nanotubes with uniform diameters and crystalline quality, but varying lengths. The nanotube lengths can be trimmed to uniform heights above the template surface using ultrasonic cutting, for example. The carbon nanotube site density can be controlled by controlling the catalyst site density. Control of the carbon nanotube site density enables various applications. For example, the highest possible site density is preferred for thermal interface materials, whereas, for field emission, significantly lower site densities are preferable.
Siegal, Michael P. (Albuquerque, NM), Friedman, Caitlin Rochford (Albuquerque, NM), Yelton, William G. (Sandia Park, NM)
15/ 603,161
May 23, 2017
STATEMENT OF GOVERNMENT INTEREST [0002] This invention was made with Government support under Contract No. DE-NA0003525 awarded by the United States Department of Energy/National Nuclear Security Administration. The Government has certain rights in the invention.