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SPARSE SAMPLING AND RECONSTRUCTION FOR ELECTRON AND SCANNING PROBE MICROSCOPE IMAGING

United States Patent Application

*** PATENT GRANTED ***
20150069233
9,093,249
A1
View the Complete Application at the US Patent & Trademark Office
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Systems and methods for conducting electron or scanning probe microscopy are provided herein. In a general embodiment, the systems and methods for conducting electron or scanning probe microscopy with an undersampled data set include: driving an electron beam or probe to scan across a sample and visit a subset of pixel locations of the sample that are randomly or pseudo-randomly designated; determining actual pixel locations on the sample that are visited by the electron beam or probe; and processing data collected by detectors from the visits of the electron beam or probe at the actual pixel locations and recovering a reconstructed image of the sample.
Anderson, Hyrum (Albuquerque, NM), Helms, Jovana (Dublin, CA), Wheeler, Jason W. (Dublin, CA), Larson, Kurt W. (Cedar Crest, NM)
14/ 482,754
September 10, 2014
STATEMENT OF GOVERNMENTAL INTEREST [0002] This invention was made with Government support under Contract No. DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The Government has certain rights in the invention.