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United States Patent Application

View the Complete Application at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
A multi-resonant detection system (MRD) chip comprises an AFM tip, a cantilever, and resonator members separately positioned relative to the cantilever and tip. The chip may be fabricated from a silicon wafer. Frequency of tip motion is detected or actuated by displacement of resonator members. A rigid member, which is coupled to the chip by flexible members, coupled to the resonator members and rigidly coupled to the cantilever, enables tip motion. Resonator members include an array of discrete resonator bars, a single resonator bar or a continuous membrane which resonates at a continuous range of frequency. Tip motion is detected by measuring displacement of the resonator members using angle of light reflection, capacitance, piezo-resistive or piezo-strain techniques. Tip motion is actuated using displacement of the resonator members and capacitive, piezo-strain or piezo-resistive techniques. Resonator members may be encased by cover plates and/or hermetically sealed for measurements in a liquid medium.
Jesse, Stephen (Knoxville, TN)
14/ 460,879
August 15, 2014
STATEMENT REGARDING FEDERALLY FUNDED RESEARCH AND DEVELOPMENT [0002] This invention was made with government support under Contract No. DE-AC05-00OR22725 between UT-Battelle, LLC. and the U.S. Department of Energy. The government has certain rights in the invention.