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Devices with small-scale channels and the fabrication thereof by etching

United States Patent Application

View the Complete Application at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
A method of producing a novel small-scale flow channel in a mesoscale analytic device from a solid multi-layered heterostructure with one or more channel layers sandwiched between adjoining barrier layers. The channel layer consists of a thin-film of a material of different composition than the barrier layers. At least one of the layers has a defined small-scale thickness. A channel or recess is formed in the heterostructure by etching away the channel layer to a preselected depth. The amount of the channel layer which is etched away determines the depth of the channel, and the thickness of the channel layer determines the width. A method of producing a die for forming a small-scale channel is also disclosed.
Ramsey, J. Michael (Chapel Hill, NC), Haynes, Tony E. (Knoxville, TN), Feldman, Leonard C. (Nashville, TN), Zehner, David M. (Lenoir City, TN)
10/ 903,310
July 30, 2004
[0002] This invention was made with government support under Contract No. DE-AC05-00OR22725 awarded by the United States Department of Energy to UT-Battelle, LLC. The government has certain rights in this invention.