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Large-scale Fabrication of Vertically Aligned ZnO Nanowire Arrays

United States Patent Application

*** PATENT GRANTED ***
20120293047
8,829,767
A1
View the Complete Application at the US Patent & Trademark Office
A generator includes a substrate, a first electrode layer, a dense plurality of vertically-aligned piezoelectric elongated nanostructures, an insulating layer and a second electrode layer. The substrate has a top surface and the first electrode layer is disposed on the top surface of the substrate. The dense plurality of vertically-aligned piezoelectric elongated nanostructures extends from the first electrode layer. Each of the nanostructures has a top end. The insulating layer is disposed on the top ends of the nanostructures. The second electrode layer is disposed on the non-conductive layer and is spaced apart from the nanostructures.
Wang, Zhong Lin (Marietta, GA), Hu, Youfan (Atlanta, GA), Zhang, Yan (Atlanta, GA), Xu, Chen (Atlanta, GA), Zhu, Guang (Atlanta, GA)
GEORGIA TECH RESEARCH CORPORATION (Atlanta GA)
13/ 473,867
May 17, 2012
STATEMENT OF GOVERNMENT INTEREST [0002] This invention was made with government support under contract No. DE-FG02-07ER46394, awarded by the Department of Energy. The government has certain rights in the invention.