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Sputter Deposition and Annealing of High Conductivity Transparent Oxides

United States Patent Application

View the Complete Application at the US Patent & Trademark Office
National Renewable Energy Laboratory - Visit the NREL Technology Transfer Website
Sputtering deposition processes for generation of transparent conductive metal oxide films, and films produced by such methods, are disclosed.
GILLASPIE, Dane (Golden, CO), Gennett, Thomas (Denver, CO), Ginley, David S. (Evergreen, CO), Perkins, John (Boulder, CO)
Alliance for Sustainable Energy, LLC. (Golden CO)
13/ 324,835
December 13, 2011
CONTRACTUAL ORIGIN [0002] The United States Government has rights in this invention under Contract No. DE-AC36-08G028308 between United States Department of Energy and the Alliance for Sustainable Energy, LLC, the Manager and Operator of the National Renewable Energy Laboratory.