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Method for preparing nanocrystalline ceramic thin films

United States Patent Application

View the Complete Application at the US Patent & Trademark Office
Oak Ridge National Laboratory - Visit the Partnerships Directorate Website
A method for preparing nanocrystalline ceramic thin films, particularly at low firing temperatures < C. The method for preparing ceramic thin films comprises preparing a seed gel of metal oxide, dissolving a source compound for cations of the oxide's metal constituents in the solution, then adding a polymerizable organic solvent to the solution and heating to form a polymeric precursor having uniformly dispersed gel seeds within a solid gel structure whereby any voids within the structure are filled with metal cation-containing polymeric precursor. The polymeric precursor is free of precipitates. A surface of a substrate is then coated with at least one layer of the gel-seeded polymeric precursor to form a uniform film of gel-seeded polymeric precursor wherein the film has a thickness of 100 nm to 200 nm per layer. The film is then sintered to convert the film to a nanocrystalline ceramic thin film having a thickness of 100 nm to 1 .mu.m and being substantially free of defects.
Hu, Michael Z. (Knoxville, TN), Dong, Junhang (Los Lunas, NM)
United States Department of Energy
10/ 453,704
June 3, 2003
[0001] The invention was made with government support under contract no. DE-AC05-00OR22725 awarded by the United States Department of Energy to UT-Battelle, LLC., and the government has certain rights in the invention.