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Polished polyimide substrate

United States Patent Application

View the Complete Application at the US Patent & Trademark Office
Polymer substrates, in particular polyimide substrates, and polymer laminates for optical applications are described. Polyimide substrates are polished on one or both sides depending on their thickness, and single-layer or multi-layer waveguide structures are deposited on the polished polyimide substrates. Optical waveguide devices are machined by laser ablation using a combination of IR and UV lasers. A waveguide-fiber coupler with a laser-machined groove for retaining the fiber is also disclosed.
Farah, John (Attleboro, MA), Sudarshanam, V. S. (US)
10/ 319,092
December 13, 2002
[0002] This invention was supported by Department of Energy Grant No. DE-FG0290ER81033, and the government has certain rights to the invention.