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Thin film hydrogen sensor

United States Patent

5,886,614
March 23, 1999
View the Complete Patent at the US Patent & Trademark Office
A thin film hydrogen sensor, includes: a substantially flat ceramic substrate with first and second planar sides and a first substrate end opposite a second substrate end; a thin film temperature responsive resistor on the first planar side of the substrate proximate to the first substrate end; a thin film hydrogen responsive metal resistor on the first planar side of the substrate proximate to the fist substrate end and proximate to the temperature responsive resistor; and a heater on the second planar side of the substrate proximate to the first end.
Cheng; Yang-Tse (Rochester Hills, MI), Poli; Andrea A. (Livonia, MI), Meltser; Mark Alexander (Pittsford, NY)
General Motors Corporation (Detroit, MI)
08/ 837,039
April 11, 1997
The Government of the United States of America has rights in this invention pursuant to Contract No. DE-AC02-90CH10435 awarded by the U.S. Department of Energy.