An RF sensor having a novel current sensing probe and a voltage sensing probe to measure voltage and current. The current sensor is disposed in a transmission line to link all of the flux generated by the flowing current in order to obtain an accurate measurement. The voltage sensor is a flat plate which operates as a capacitive plate to sense voltage on a center conductor of the transmission line, in which the measured voltage is obtained across a resistance leg of a R-C differentiator circuit formed by the characteristic impedance of a connecting transmission line and a capacitance of the plate, which is positioned proximal to the center conductor.
United States Government has rights in this invention pursuant to Cooperative Research And Development Agreement ("CRADA") No. 01082, among SEMATECH INC., SANDIA CORPORATION and LOCKHEED MARTIN ENERGY RESEARCH CORPORATION.