A technique for determining properties such as Young's modulus, coefficient of thermal expansion, and residual stress of individual layers within a multi-layered sample is presented. The technique involves preparation of a series of samples, each including one additional layer relative to the preceding sample. By comparison of each sample to a preceding sample, properties of the topmost layer can be determined, and residual stress at any depth in each sample, resulting from deposition of the top layer, can be determined.
This invention was made with government support under Contract No. DE-AC07-941D13223 awarded by the U.S. Department of Energy and Grant No. N00014-94-1-0139 awarded by the Department of the Navy. The government has certain rights in the invention.