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Miniature pulsed vacuum arc plasma gun and apparatus for thin-film fabrication

United States Patent

5,841,236
November 24, 1998
View the Complete Patent at the US Patent & Trademark Office
Lawrence Berkeley National Laboratory - Visit the Technology Transfer and Intellectual Property Management Department Website
A miniature (dime-size in cross-section) vapor vacuum arc plasma gun is described for use in an apparatus to produce thin films. Any conductive material can be layered as a film on virtually any substrate. Because the entire apparatus can easily be contained in a small vacuum chamber, multiple dissimilar layers can be applied without risk of additional contamination. The invention has special applications in semiconductor manufacturing.
Brown; Ian G. (Berkeley, CA), MacGill; Robert A. (Richmond, CA), Galvin; James E. (Emmeryville, CA), Ogletree; David F. (El Cerrito, CA), Salmeron; Miquel (El Cerrito, CA)
The Regents of the University of California (Oakland, CA)
08/ 326,667
September 14, 1994
This invention was made with Government support under Contract No. DEAC03-76SF00098 between the U.S. Department of Energy and the University of California for the operation of Lawrence Berkeley Laboratory. The Government has certain rights in this invention.