The present invention discloses a saturable reactor and a method for decoupling the interwinding capacitance from the frequency limitations of the reactor so that the equivalent electrical circuit of the saturable reactor comprises a variable inductor. The saturable reactor comprises a plurality of physically symmetrical magnetic cores with closed loop magnetic paths and a novel method of wiring a control winding and a RF winding. The present invention additionally discloses a matching network and method for matching the impedances of a RF generator to a load. The matching network comprises a matching transformer and a saturable reactor.
The United States Government has rights in this invention pursuant to Cooperative Research and Development Agreement ("CRADA") No. 01082, among SEMATECH Inc., Sandia Corporation and Lockheed Martin Energy Research Corporation.