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Amorphous diamond films

United States Patent

5,763,087
June 9, 1998
View the Complete Patent at the US Patent & Trademark Office
Lawrence Livermore National Laboratory - Visit the Industrial Partnerships Office Website
Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.
Falabella; Steven (Livermore, CA)
Regents of the University of California (Oakland, CA)
08/ 526,396
September 11, 1995
ORIGIN OF THE INVENTION The U.S. Government has rights in this invention pursuant to Contract No. W-7405-ENG-48 between the U.S. Department of Energy and the University of California for the operation of the Lawrence Livermore National Laboratory .